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MEMS fabrication is typically a multilayer fabrication process when we consider devices and is also highly iterative thus needing multiple changes
For making such masks a MEMS laboratory needs a laser pattern generator for easy control on mask- fabrication process [13, 14].
The critical dimen- sions serve as a base to select the fabrication process by which the first prototype can be manufactured.
The hot embossing is a rapid fabrication process for thermoplastic material, which is heated above a glass transition temperature, while being pressed against a master.
Micromilling is a subtractive fabrication process based on the mechanical removal of material by a cutting tool from a stock piece, also known as substrate or workpiece* resulting in micrometre-sized features..
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